Pashchenko G, Kravetsky M, Fomin O. Singularities of Polishing Substrates GaAs by Chemo-Dynamical and Non-Contact Chemo-Mechanical Methods. Phys. Chem. Sol. State [Internet]. 2015 Sep. 15 [cited 2024 May 6];16(3):560-4. Available from: https://scijournals.pnu.edu.ua/index.php/pcss/article/view/1653