Novosiadlyi, S.P., Mandzyuk V.І., N.T. Humeniuk, and Huk І.Z. “Peculiarities of Forming of Microwave Arsenide-Gallium Submicron Structures of Large-Scale Integrated Circuit”. Physics and Chemistry of Solid State 19, no. 2 (May 3, 2019): 186–190. Accessed April 28, 2024. https://scijournals.pnu.edu.ua/index.php/pcss/article/view/115.