GAVRYLIUK, O.O.; SEMCHUK, O.Yu.; LYTOVCHENKO, B.V. Theoretical and Experimental Investigations of Laser Annealing Non-Stoichiometric SiOx Films . Physics and Chemistry of Solid State, [S. l.], v. 16, n. 4, p. 675–678, 2015. DOI: 10.15330/pcss.16.4.675-678. Disponível em: https://scijournals.pnu.edu.ua/index.php/pcss/article/view/1615. Acesso em: 3 may. 2024.