Scattering of low-energy Ne+ ions from the stepped surface of InGaP(001)<110> at the small angles of incidence

  • U.O. Kutliev Urgench State University, Urgench, Uzbekistan
  • M.U. Otabaev Urgench State University, Urgench, Uzbekistan
  • M.K. Karimov Urgench State University, Urgench, Uzbekistan
  • F.K. Masharipov Urgench State University, Urgench, Uzbekistan
  • I. Woiciechowski Alderson Broaddus University, Philippi, USA
Keywords: Ion scattering, Semichannel, Defect, Computer simulation


Scattering of Ne+ ions at small angles of incidence from a stepped InGaP(001) <110> surface by the E0=5 keV was simulated using computer simulation. The trajectories of dechanneled ions from defect surface, as well as their energies at the scattering and scattering angle, are studied. It is shown that before dechanneling, the frequency and amplitude of the trajectory of ions, which move the surface channel formed by the stepped atom, increase. The energy distributions of these ions are obtained and the part of the spectrum corresponding to these ions is determined. It has been established that the energetic dechanneled ions formed  low intensity peaks on the low-energy part of the spectrum.


J.M. Haile, Molecular Dynamics Simulation -Elementary Methods, New York, Wiley-Interscience, 386 p. (1992).

M. Kaminsky, Atomic and ion collisions on the surface of a metal. Mir, M., 506 p. (1967).

A. Zanderny, Surface analysis methods, Mir, Moscow, 582 p/ (1979).

V. Eckstein, Computer modeling of the interaction of particles with the surface of a solid body: Tranl. from English. Mir, M, 320 p. (1995).

E.S. Mashkova, Fundamental and applied aspects of spraying solids, Mir, M., 349 p. (1986).

I.N. Evdokimov, Ion-stimulated secondary effects in the near-surface region of a solid, Abstracts of reports of the All-Union Sem. Secondary ion and ion-photon emission, Kharkiv,141 (1985).

E.S. Mashkova, V.M. Molchanov, Yu.G. Skripka, A mechanism of ion scattering by crystal, Physics Letters A. 33, 373 (1970);

T.Grehl, E.Niehuis, and H.H. Brongersma, Surface Microanalysis by Low-Energy Ion Scattering, Microscopy Today. 19(2), 34 (2011);

U.O. Kutliev, M.K. Karimov, F.O. Kuryozov and K.U. Otabaeva, Analysis of InGaP(001) surface by the low energy ion scattering spectroscopy, Journal of Physics: Conference Series 1889, 022063 (2021);

H.R.J. ter Veen, T. Kim, I.E. Wachs, and H.H. Brongersma, Applications of High Sensitivity-Low Energy Ion Scattering (HS-LEIS) in heterogeneous catalysi, Catalysis Today. 140, 197 (2009);

M.K. Karimov, F.O. Kuryozov, S.R. Sadullaev, M.U. Otabaev, S.B. Bobojonova, Investigation of Defect InP(001) Surface by Low Energy Ion Scаttering Spectroscopy, Materials Science Forum 1049, 192 (2022);

M.K. Karimov, U.O. Kutliev, M.U. Otabaev, I.A. Khajieva, Investigation of stepped InP(001)<110> surface by the method of low energy ion scattering, Journal of Physics: Conference Series, 2373(3), 032003 (2022);

E.S. Parilis, L.M. Kishinevsky, N.Yu. Turaev, B.E. Baklitzky, F.F. Umarov, V.Kh. Verleger, S.L. Nizhnaya, I.S. Bitensky, Atomic collisions on solid surfaces 93, 382 (North-Holland: Amsterdam: 1993).

W. Pilz, J.V. Borany, R. Grötzschel, W. Jiang, M. Posselt, B. Schmidt, Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 419, 137 (1998).

M.T. Robinson, MARLOWE Binary Collision Cascade Simulation Program, Version 15b, A Guide for Users, London, 231p. (2002).

M.T. Robinson, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 67, 396 (1992).

How to Cite
KutlievU., OtabaevM., KarimovM., MasharipovF., & WoiciechowskiI. (2023). Scattering of low-energy Ne+ ions from the stepped surface of InGaP(001)<110&gt; at the small angles of incidence. Physics and Chemistry of Solid State, 24(3), 542-548.
Scientific articles (Physics)