Nanotexturing of Silicon by Metal-Assisted Chemical Etching

Array

Authors

  • Ye. I. Berezhanskyi National University “Lvivska Politechnika”
  • S. I. Nichkalo National University “Lvivska Politechnika”
  • V. Yu. Yerokhov National University “Lvivska Politechnika”
  • A. A. Druzhynin National University “Lvivska Politechnika”

DOI:

https://doi.org/10.15330/pcss.16.1.140-144

Keywords:

silicon nanostructures, photoelectric converter, meatl-asisted chemical etching

Abstract

This paper describes the method of metal assisted chemical etching (MacEtch) as an efficient approach for structuring the silicon surface with the ability to manage effectively the geometric parameters of the structures and their distribution on the surface of substrate. The surface texturing technology was presented and the structured silicon surfaces with regular and irregular types of surfaces have been obtained. This technology can be used for nanotexturing of the surface of silicon photovoltaic converters. The model of photovoltaic converter based on the crater-textured silicon surface with high efficiency was presented.

References

N.-B. Wong et al, J. Phys. Chem. C, 112, 4444 (2008).

X. Duan et al, Nano Lett., 9(12), 4539 (2009).

N. Geyer, Z. Huang et al, Nano Lett. 9(9), 3106 (2009).

N. Fang, P. Ferreira, X. Li et al, Nano Lett. 10, 1582 (2010).

W. Lee, U. Gösele et al, Nano Lett. 8 (9), 3046 (2008).

C. P. Wong et al, AscNano 3(12), 4033 (2009).

J. de Boor et al, Nanotechnology 21, 095302 (2010).

M. K. Dawood et al, Nanotechnology 21, 205305 (2010).

A. G. Fedorov et al, ACS Appl. Mater. Interfaces 2(4), 969 (2010).

X. Li and P. W. Bohn, Appl. Phys. Lett. 77(16), 2572 (2000).

S. Chattopadhyay and P. W. Bohn, J. Appl. Phys. 96(11), 6888 (2004).[12] J. Zhu et al, Chem. Mater. 21, 2721 (2009).

J. Zhu et al, Chem. Mater. 21, 2721 (2009).

I. S. Chun, E. K. Chow, and X. Li, Appl. Phys. Lett. 92, 191113 (2008).

I. R. Iatsunskyi, Tekhnologiya i Konstruirovanie v Elektronnoi Apparature 6, 52 (2013).

Z. Huang, T. Shimizu, S. Senz et al, J. Phys. Chem. C 114, 10683 (2010).

Z. Huang, T. Shimizu, S. Senz et al, Nano Lett. 9, 2519 (2009).

C. Chartier, S. Bastide, C. Levy-Clement, Electrochimoca Acta 53, 5509 (2008).

R. Chaoui, B. Mahmoudi, Y. Si Ahmed, Phys.Stat.Sol. (a) 205(7), 1724 (2008).

A.A. Druzhinin, I.P. Ostrovskii, Yu.N. Khoverko, S.I. Nichkalo, Ye.I. Berezhanskii, Tekhnologiya i Konstruirovanie v Elektronnoi Apparature 5, 11 (2011).

Published

2015-03-15

How to Cite

Berezhanskyi, Y. I., Nichkalo, S. I., Yerokhov, V. Y., & Druzhynin, A. A. (2015). Nanotexturing of Silicon by Metal-Assisted Chemical Etching: Array. Physics and Chemistry of Solid State, 16(1), 140–144. https://doi.org/10.15330/pcss.16.1.140-144

Issue

Section

Scientific articles